DXRL

Welcome to DXRL @ Elettra

Deep X-ray lithography (DXRL) allows the production of high aspect ratio three dimensional structures in polymer with quasi perfect side-wall verticality and optical quality roughness. These structures can then be used as templates to mass-produce microparts made out of a large variety of metals, alloys or ceramics. The technique used to fabricate these parts is called LIGA.
It opens a wide variety of potential applications in the field of microelectromechanical systems (MEMs), fibre and integrated optics, microfluidic devices and interconnection technology. Moreover, the beamline performs an irradiaiton of samples with controlled X-ray doses, allowing therefore material science studies and the fabrication of microdevices made of new materials.

  DOWNLOAD ELETTRA  DXRL INFORMATION_pdf

Research Highlights

Top-down patterning of Zeolitic Imidazolate Framework composite thin films by deep X-ray lithography

For the first time a top-down process was used to control the spatial location of Metal–Organic Frameworks on a surface
C. Dimitrakakis et al. Chemical Communications ,2012,48 (60) , pp. 7483-7485 , doi: 10.1039/c2cc33292b

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Simultaneous Microfabrication and Tuning of the Permselective Properties in Microporous Polymers Using X-ray Lithography

DXRL has been employed to expose a photosensitive organic polymer whose microporosity is tuned by changing the X-ray dose..
    S. H. Han et al,  Small, DOI: 10.1002/smll.201202735 (2013).

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A high volume and low damage route to hydroxyl functionalization of carbon nanotubes using hard X-ray lithography

The efficient functionalization of large quantities of carbon nanotubes entangled in a nonwoven fashion into bucky-papers has been demonstrated through exposure to hard X-rays generated by a synchrotron source.
  Ludovic F.Dume´e et al, (2013)  http://www.sciencedirect.com/science/article/pii/S0008622312007178

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Proposal Submission

We invite users and industrial customers to contact
alessio.turchet@elettra.trieste.it  
benedetta.marmiroli@elettra.trieste.it

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